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微波等离子体化学气相沉积(MPCVD)是制备高品质金刚石的首选。优化MPCVD设备设计，提高其可输入功率水平，是改善MPCVD法沉积刚石效率的有效途径。随着计算机技术的进步，数值模拟极大地促进了MPCVD设备研制技术的发展。近年来，培育钻石市场的繁荣和金刚石材料在高新技术领域迫切的应用需求，使MPCVD技术在其被发明30多年后又迎来新的研究热潮。本文首先简要综述了高功率MPCVD设备研制及微波等离子体数值模拟技术的发展历史及其现状；其次，简单介绍了河北普莱斯曼金刚石科技有限公司近年来在MPCVD技术领域的研究进展；最后对金刚石产品在相关领域的应用进行简单介绍与展望。
Abstract：Microwave plasma chemical vapor deposition(MPCVD) is the preferred method for preparing high-quality diamonds. Optimizing the design of MPCVD equipment and increasing its input power level are effective strategies to improve the efficiency of diamond deposition by MPCVD. Advances in computer technology have significantly promoted the development of MPCVD through numerical simulation of microwave plasma. The prosperity of the laboratory-grown diamond market and the urgent demand for the application of diamond materials in high-tech fields have led to a new research boom in MPCVD since its invention over 30 years ago. This article first outlines the development of high-power MPCVD equipment and microwave plasma numerical simulation technology. Furthermore, the recent research progress of Hebei Plasma Diamond Technology Co., Ltd. in this field is highlighted. Finally, the applications of diamond products in related fields are briefly discussed along with future prospects.
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基本信息:
DOI：10.16191/j.cnki.hbkx.2025.06.009
中图分类号:TQ163
引用信息:
[1]李义锋,姜龙,安晓明,等.高功率微波等离子体化学气相沉积金刚石设备研发与应用[J].河北省科学院学报,2025,42(06):27-40.DOI:10.16191/j.cnki.hbkx.2025.06.009.
基金信息:
国家磁约束核聚变能发展研究专项资助(2019YFE03100300); 河北省自然科学基金(E2019302005); 河北省科学院科技计划项目(18502;19502;20502;2021G05;2022G12;2023G22)
